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The most important requirement of an effective metallization scheme in VLSI is that metal must adhere to the silicon in the window and to the oxide that defines the window. In this respect, which of the following metals is unlikely to be used directly on SiO2


66. The most important requirement of an effective metallization scheme in VLSI is that metal must adhere to the silicon in the window and to the oxide that defines the window. In this respect, which of the following metals is unlikely to be used directly on SiO2?
A. Al B. Ti C. Ta D. W
Answer: option D
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